ULTRA HIGH PURITY PRESSURE
& VACUUM SWITCHES
The UC8 Series incorporates an elgiloy diaphragm. This provides the series with superior corrosion resistance performance that is unmatched by other offerings in the market.
The UC8 series incorporates Wasco’s proprietary manufacturing method and an all- welded construction which eliminates all leak paths.
This series is a perfect switch for systems that require sensing of corrosive media in a high accuracy, tight tolerance application.
We’ve designed these switches for highly corrosive environments found in next- generation semiconductor processing equipment.
The UC8 series is rated for more than 2,000,000 95B2 application cycles (which is more than double our competitors).
The UC8 series has materials available that meet or exceed SEMI F20 (UHP) with a critical pitting temperature performance of > 35ºC.
All switches are helium leak tested to ≤ 1 x 10-9 std cc/sec Helium per SEMI F1.
IGS Gas Panels
Gas Distribution Systems
Valve Manifold Boxes
Etch & Deposition Systems