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Wasco UHP160 series

UHP160 Series

Ultra High Purity
ISO 5 Clean Room Assembly

Industry leading customers have depended upon the reliability and performance of the UHP160 Series since 1989. This series features an all stainless steel sensor in addition to an all welded construction. The UHP160 Series incorporates Wasco’s proprietary manufacturing method which eliminates all leak paths. This series is a perfect switch to handle corrosive media with high accuracy and tight tolerance.

We’ve designed these switches for ultra high purity applications such as semiconductor equipment. The UHP160 Series does not contain any elastomer or an O-ring. All switches are helium leak tested to ≤ 1 x 10-9 std cc/sec per SEMI F1. The UHP160 Series is manufactured and packaged inside a Class 100 cleanroom.

전형적인 적용 분야

Gas Boxes
Ozone Systems
Gas Distribution Systems
Semiconductor Equipment
Medical Equipment

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