Wasco’s Barracuda Series of Ultra High Purity (UHP) Sensors are designed for applications that require sensing of a corrosive media in demanding market applications. These transducers are ideally suited to sense gaseous or liquid media without introducing contamination to the process media. This series is perfect for systems that require sensing of corrosive media in a high accuracy, tight tolerance application.
We’ve designed these transducers for highly corrosive environments found in next-generation semiconductor processing equipment. The Barracuda series is rated for more than 10,000,000 application cycles. The Barracuda has materials available that meet or exceed SEMI F20 (UHP) with a critical pitting temperature performance of > 35ºC. All sensors are helium leak tested to ≤ 1 x 10-9 std cc/sec Helium per SEMI F1.
TYPICAL APPLICATIONS
Gas Boxes
IGS Gas Panels
Gas Distribution Systems
Valve Manifold Boxes
Etch & Deposition Systems